Inventor
PETERS CARSTEN
DE37 patents
⚠️ This page may combine multiple inventors who share the name “PETERS CARSTEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO DEVICES INC
13 patentsUS7928004B2Apr 19, 2011
Nano imprint technique with increased flexibility with respect to alignment and feature shaping
ADVANCED MICRO DEVICES INC16 citations92
US7678690B2Mar 16, 2010
Semiconductor device comprising a contact structure with increased etch selectivity
ADVANCED MICRO DEVICES INC12 citations84
US7592258B2Sep 22, 2009
Metallization layer of a semiconductor device having differently thick metal lines and a method of forming the same
ADVANCED MICRO DEVICES INC7 citations74
US7416973B2Aug 26, 2008
Method of increasing the etch selectivity in a contact structure of semiconductor devices
ADVANCED MICRO DEVICES INC8 citations73
US7875514B2Jan 25, 2011
Technique for compensating for a difference in deposition behavior in an interlayer dielectric material
ADVANCED MICRO DEVICES INC2 citations63
US7608501B2Oct 27, 2009
Technique for creating different mechanical strain by forming a contact etch stop layer stack having differently modified intrinsic stress
ADVANCED MICRO DEVICES INC2 citations62
US7482219B2Jan 27, 2009
Technique for creating different mechanical strain by a contact etch stop layer stack with an intermediate etch stop layer
ADVANCED MICRO DEVICES INC6 citations62
US7915170B2Mar 29, 2011
Reducing contamination of semiconductor substrates during beol processing by providing a protection layer at the substrate edge
ADVANCED MICRO DEVICES INC5 citations57
US7910496B2Mar 22, 2011
Technique for forming an interlayer dielectric material of increased reliability above a structure including closely spaced lines
ADVANCED MICRO DEVICES INC0 citations52
US7906815B2Mar 15, 2011
Increased reliability for a contact structure to connect an active region with a polysilicon line
ADVANCED MICRO DEVICES INC0 citations52
US7785956B2Aug 31, 2010
Technique for compensating for a difference in deposition behavior in an interlayer dielectric material
ADVANCED MICRO DEVICES INC0 citations52
US7767593B2Aug 3, 2010
Semiconductor device including field effect transistors laterally enclosed by interlayer dielectric material having increased intrinsic stress
ADVANCED MICRO DEVICES INC1 citations52
US7998823B2Aug 16, 2011
Method for reducing leakage currents caused by misalignment of a contact structure by increasing an error tolerance of the contact patterning process
ADVANCED MICRO DEVICES INC0 citations42
GLOBALFOUNDRIES INC
9 patentsUS10483154B1Nov 19, 2019
Front-end-of-line device structure and method of forming such a front-end-of-line device structure
GLOBALFOUNDRIES INC399 citations97
US7902581B2Mar 8, 2011
Semiconductor device comprising a contact structure based on copper and tungsten
GLOBALFOUNDRIES INC18 citations84
US7764078B2Jul 27, 2010
Test structure for monitoring leakage currents in a metallization layer
GLOBALFOUNDRIES INC10 citations84
US9305878B2Apr 5, 2016
Integrated circuits and methods for fabricating integrated circuits with capping layers between metal contacts and interconnects
GLOBALFOUNDRIES INC2 citations62
US8932911B2Jan 13, 2015
Integrated circuits and methods for fabricating integrated circuits with capping layers between metal contacts and interconnects
GLOBALFOUNDRIES INC2 citations62
US7879709B2Feb 1, 2011
Semiconductor structure comprising an electrically conductive feature and method of forming a semiconductor structure
GLOBALFOUNDRIES INC6 citations62
US7638424B2Dec 29, 2009
Technique for non-destructive metal delamination monitoring in semiconductor devices
GLOBALFOUNDRIES INC3 citations62
US9257329B2Feb 9, 2016
Methods for fabricating integrated circuits including densifying interlevel dielectric layers
GLOBALFOUNDRIES INC2 citations56
US10522555B2Dec 31, 2019
Semiconductor devices including Si/Ge active regions with different Ge concentrations
GLOBALFOUNDRIES INC0 citations52
HILTI AG
9 patentsUS10252321B2Apr 9, 2019
Twist drill and production method
HILTI AG4 citations71
US11123855B2Sep 21, 2021
Control method and borehole flushing module
HILTI AG4 citations70
US11213939B2Jan 4, 2022
Chisel
HILTI AG2 citations63
US11850716B2Dec 26, 2023
Drill for chiselling rock
HILTI AG1 citations60
US12479077B2Nov 25, 2025
Portable power tool
HILTI AG0 citations59
US11577429B2Feb 14, 2023
Manufacturing process, tool stand, and drill bit
HILTI AG0 citations59
US10940527B2Mar 9, 2021
Manufacturing process, tool stand, and drill bit
HILTI AG0 citations59
US10245657B2Apr 2, 2019
Twist drill and production method
HILTI AG0 citations50
US10906166B2Feb 2, 2021
Control method and portable power tool
HILTI AG0 citations46
SEIDEL ROBERT
2 patentsUS8293641B2Oct 23, 2012
Nano imprint technique with increased flexibility with respect to alignment and feature shaping
SEIDEL ROBERT6 citations83
US8580684B2Nov 12, 2013
Contact elements of semiconductor devices comprising a continuous transition to metal lines of a metallization layer
SEIDEL ROBERT0 citations51