Inventor
CHURLEY MICHAEL J
US4 patents
Patents
4 patentsUS5348587ASep 20, 1994
Apparatus for elimination of low temperature ammonia salts in TiCl4 NH3 CVD reaction
MATERIALS RESEARCH CORP49 citations93
US5308655AMay 3, 1994
Processing for forming low resistivity titanium nitride films
MATERIALS RESEARCH CORP76 citations93
US5271963ADec 21, 1993
Elimination of low temperature ammonia salt in TiCl4 NH3 CVD reaction
MATERIALS RESEARCH CORP59 citations93
US5279857AJan 18, 1994
Process for forming low resistivity titanium nitride films
MATERIALS RESEARCH CORP53 citations90