Inventor
TAKAHASHI TETSURO
JP20 patents
⚠️ This page may combine multiple inventors who share the name “TAKAHASHI TETSURO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS7695763B2Apr 13, 2010
Method for cleaning process chamber of substrate processing apparatus, substrate processing apparatus, and method for processing substrate
TOKYO ELECTRON LTD6 citations72
US10460949B2Oct 29, 2019
Substrate processing apparatus, substrate processing method and storage medium
TOKYO ELECTRON LTD2 citations71
US7857984B2Dec 28, 2010
Plasma surface treatment method, quartz member, plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD3 citations62
US7915179B2Mar 29, 2011
Insulating film forming method and substrate processing method
TOKYO ELECTRON LTD5 citations59
US9691630B2Jun 27, 2017
Etching method
TOKYO ELECTRON LTD1 citations51
US12215417B2Feb 4, 2025
Substrate processing method and substrate processing device
TOKYO ELECTRON LTD0 citations50
US7842621B2Nov 30, 2010
Method of measuring nitrogen concentration, method of forming silicon oxynitride film, and method of manufacturing semiconductor device.
TOKYO ELECTRON LTD0 citations39
FUJITSU LTD
4 patentsUS7599926B2Oct 6, 2009
Reputation information processing program, method, and apparatus
FUJITSU LTD10 citations84
US9582758B2Feb 28, 2017
Data classification method, storage medium, and classification device
FUJITSU LTD1 citations51
US9916376B2Mar 13, 2018
Digital document keyword generation
FUJITSU LTD0 citations41
US10303709B2May 28, 2019
Population formation method, population formation apparatus, and computer-readable recording medium
FUJITSU LTD0 citations36