P

Inventor

LIU KUN YI

TW8 patents
⚠️ This page may combine multiple inventors who share the name “LIU KUN YI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

5 patents
US6824931B2Nov 30, 2004

Verification photomask

TAIWAN SEMICONDUCTOR MFG69 citations95
US6664177B1Dec 16, 2003

Dielectric ARC scheme to improve photo window in dual damascene process

TAIWAN SEMICONDUCTOR MFG31 citations89
US6030732AFeb 29, 2000

In-situ etch process control monitor

TAIWAN SEMICONDUCTOR MFG18 citations82
US6602642B2Aug 5, 2003

Optical proximity correction verification mask

TAIWAN SEMICONDUCTOR MFG11 citations73
US6602641B1Aug 5, 2003

Wafer's zero-layer and alignment mark print without mask when using scanner

TAIWAN SEMICONDUCTOR MFG3 citations60

WAFERTECH LLC

2 patents
US7489982B2Feb 10, 2009

Method and software for conducting efficient lithography WPH / lost time analysis in semiconductor manufacturing

WAFERTECH LLC13 citations76
US7659965B2Feb 9, 2010

High throughput wafer stage design for optical lithography exposure apparatus

WAFERTECH LLC2 citations60

LIU KUN-YI

1 patent
US8951833B2Feb 10, 2015

Defect free deep trench method for semiconductor chip

LIU KUN-YI0 citations43