Inventor
TAKAHASHI TAKAHIKO
JP13 patents
Patents
13 patentsUS5055696AOct 8, 1991
Multilayered device micro etching method and system
HITACHI LTD207 citations99
US6753253B1Jun 22, 2004
Method of making wiring and logic corrections on a semiconductor device by use of focused ion beams
HITACHI LTD97 citations98
US5683547ANov 4, 1997
Processing method and apparatus using focused energy beam
HITACHI LTD156 citations97
US5086015AFeb 4, 1992
Method of etching a semiconductor device by an ion beam
HITACHI LTD75 citations96
US4900695AFeb 13, 1990
Semiconductor integrated circuit device and process for producing the same
HITACHI LTD151 citations96
US4868068ASep 19, 1989
IC wiring connecting method and resulting article
HITACHI LTD59 citations96
US5182231AJan 26, 1993
Method for modifying wiring of semiconductor device
HITACHI LTD56 citations94
US5497034AMar 5, 1996
IC wiring connecting method and apparatus
HITACHI LTD22 citations92
US5043297AAug 27, 1991
Wiring method of on-chip modification for an LSI
HITACHI LTD22 citations92
US5026664AJun 25, 1991
Method of providing a semiconductor IC device with an additional conduction path
HITACHI LTD35 citations92
US5472507ADec 5, 1995
IC wiring connecting method and apparatus
HITACHI LTD19 citations82
US5824598AOct 20, 1998
IC wiring connecting method using focused energy beams
HITACHI LTD9 citations74
US4469535ASep 4, 1984
Method of fabricating semiconductor integrated circuit devices
HITACHI LTD0 citations34