Inventor

VAN DER ZANDEN MARCUS JOHANNES

NL6 patents

⚠️ This page may combine multiple inventors who share the name “VAN DER ZANDEN MARCUS JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US11372339B1Jun 28, 2022

Device manufacturing method and computer program

ASML NETHERLANDS BV0 citations53

US9291914B2Mar 22, 2016

Fluid handling structure, a lithographic apparatus and a device manufacturing method

ASML NETHERLANDS BV0 citations51

BESSEMS DAVID

1 patent

US8836912B2Sep 16, 2014

Fluid handling structure, a lithographic apparatus and a device manufacturing method

BESSEMS DAVID6 citations81

DIRECKS DANIEL JOZEF MARIA

1 patent

US8259283B2Sep 4, 2012

Immersion lithographic apparatus and device manufacturing method

DIRECKS DANIEL JOZEF MARIA10 citations81

PHILIPS DANNY MARIA HUBERTUS

1 patent

US8638417B2Jan 28, 2014

Fluid handling structure, lithographic apparatus and a device manufacturing method

PHILIPS DANNY MARIA HUBERTUS1 citations45

KNAAPEN THIJS EGIDIUS JOHANNES

1 patent

US8780321B2Jul 15, 2014

Lithographic apparatus and device manufacturing method

KNAAPEN THIJS EGIDIUS JOHANNES0 citations28