Inventor

WEISS GUNDULA

DE8 patents

⚠️ This page may combine multiple inventors who share the name “WEISS GUNDULA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

3 patents

US10146135B2Dec 4, 2018

Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation

ZEISS CARL SMT GMBH0 citations52

US9946161B2Apr 17, 2018

Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method

ZEISS CARL SMT GMBH1 citations51

US9052606B2Jun 9, 2015

Microlithographic projection exposure apparatus

ZEISS CARL SMT GMBH1 citations51

LAYH MICHAEL

2 patents

US8724086B2May 13, 2014

Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation

LAYH MICHAEL4 citations72

US8891057B2Nov 18, 2014

Microlithographic projection exposure apparatus

LAYH MICHAEL2 citations61

SCHUSTER KARL-HEINZ

1 patent

US8068279B2Nov 29, 2011

Optical system of an illumination device of a projection exposure apparatus

SCHUSTER KARL-HEINZ10 citations78

VOLKENANDT HARALD

1 patent

US8259392B2Sep 4, 2012

Method of producing a diffractive optical element and diffractive optical element produced by such a method

VOLKENANDT HARALD0 citations41

RUNDE DANIEL

1 patent

US9025131B2May 5, 2015

Optical beam deflecting element, illumination system including same, and related method

RUNDE DANIEL0 citations28