Inventor
HIGLEY DOUG
US3 patents
Patents
3 patentsUS9455139B2Sep 27, 2016
Methods and apparatus for wetting pretreatment for through resist metal plating
NOVELLUS SYSTEMS INC11 citations82
US10301738B2May 28, 2019
Methods and apparatus for wetting pretreatment for through resist metal plating
NOVELLUS SYSTEMS INC1 citations71
US9828688B2Nov 28, 2017
Methods and apparatus for wetting pretreatment for through resist metal plating
NOVELLUS SYSTEMS INC3 citations71