Inventor
SAMBONSUGE SHOTA
JP7 patents
Patents
7 patentsUS10600875B2Mar 24, 2020
Semiconductor device and method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB5 citations72
US11616149B2Mar 28, 2023
Semiconductor device and method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB1 citations62
US11610997B2Mar 21, 2023
Semiconductor material and semiconductor device having a metal element and nitrogen
SEMICONDUCTOR ENERGY LAB0 citations62
US11211467B2Dec 28, 2021
Semiconductor device and method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB0 citations62
US10964787B2Mar 30, 2021
Semiconductor device and method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB0 citations62
US12315717B2May 27, 2025
Method for manufacturing metal oxynitride film
SEMICONDUCTOR ENERGY LAB0 citations60
US11728163B2Aug 15, 2023
Method for manufacturing metal oxynitride film
SEMICONDUCTOR ENERGY LAB0 citations60