Inventor

LIGHT SCOTT L

US39 patents

⚠️ This page may combine multiple inventors who share the name “LIGHT SCOTT L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LIGHT SCOTT L

MICRON TECHNOLOGY INC

Method and apparatus for shaping and/or orienting radiation irradiating a microlithographic substrate

Method and apparatus for controlling radiation beam intensity directed to microlithographic substrates

Method and apparatus for irradiating a microlithographic substrate

Methods of forming patterned compositions

Method for controlling radiation beam intensity directed to microlithographic substrates

Method and apparatus for irradiating a microlithographic substrate

Method and device for improved lithographic critical dimension control

Method for improved lithographic critical dimension control

Method and device for improved lithographic critical dimension control

Arrays of capacitors, methods used in forming integrated circuitry, and methods used in forming an array of capacitors

Methods of forming a pattern

Microelectronic devices including semiconductive pillar structures, and related electronic systems

Methods for forming semiconductor devices and semiconductor device structures

Semiconductor constructions and methods of forming patterns

Methods of forming a pattern on a substrate

Method and apparatus for controlling radiation beam intensity directed to microlithographic substrates

Semiconductor constructions comprising dielectric material, and methods of forming dielectric fill within openings extending into semiconductor constructions

Semiconductor devices comprising conductive patterns of varying dimensions and related systems

Method and apparatus for irradiating a microlithographic substrate

Methods of forming line patterns in substrates

Methods of forming a pattern on a substrate

Devices including conductive interconnect structures, related electronic systems, and related methods

Microelectronic devices including semiconductive pillar structures, and related electronic systems

Semiconductor constructions comprising dielectric material, and methods of forming dielectric fill within openings extending into semiconductor constructions

Semiconductor constructions comprising dielectric material

Imaging devices, methods of forming same, and methods of forming semiconductor device structures

Lithography methods, methods for forming patterning tools and patterning tools

Microelectronic devices with staircased stadiums and both through-step and to-step contacts, and related systems and methods

Methods of forming patterns for semiconductor device structures

Methods of forming a pattern on a substrate

Microelectronic devices including memory cell structures, and related methods and electronic systems

LIGHT SCOTT L

Methods of forming a pattern on a substrate

Reticles, and methods of mitigating asymmetric lens heating in photolithography

Methods of processing substrates

HE YUAN

Lithography wave-front control system and method

Methods of correcting for variation across substrates during photolithography

MILLWARD DAN

Semiconductor constructions and methods of forming patterns

LODESTAR LICENSING GROUP LLC

Arrays of capacitors, methods used in forming integrated circuitry, and methods used in forming an array of capacitors

ZHOU JIANMING

Lithography methods, methods for forming patterning tools and patterning tools