Inventor
MANSFIELD SCOTT
US7 patents
⚠️ This page may combine multiple inventors who share the name “MANSFIELD SCOTT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
3 patentsUS6553559B2Apr 22, 2003
Method to determine optical proximity correction and assist feature rules which account for variations in mask dimensions
IBM296 citations98
US6602728B1Aug 5, 2003
Method for generating a proximity model based on proximity rules
IBM73 citations95
US7029830B2Apr 18, 2006
Precision and apertures for lithographic systems
IBM0 citations40