Inventor

DINEV JIVKO

US6 patents

⚠️ This page may combine multiple inventors who share the name “DINEV JIVKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DINEV JIVKO

2 patents

US8920599B2Dec 30, 2014

High efficiency gas dissociation in inductively coupled plasma reactor with improved uniformity

DINEV JIVKO2 citations57

US9023227B2May 5, 2015

Increased deposition efficiency and higher chamber conductance with source power increase in an inductively coupled plasma (ICP) chamber

DINEV JIVKO0 citations44

PAMARTHY SHARMA

1 patent

US8475625B2Jul 2, 2013

Apparatus for etching high aspect ratio features

PAMARTHY SHARMA15 citations73

APPLIED MARTERIALS INC

1 patent

US7554334B2Jun 30, 2009

Matching network characterization using variable impedance analysis

APPLIED MARTERIALS INC7 citations68

APPLIED MATERIALS INC

1 patent

US9236305B2Jan 12, 2016

Wafer dicing with etch chamber shield ring for film frame wafer applications

APPLIED MATERIALS INC2 citations62

FOVELL RICHARD

1 patent

US8596336B2Dec 3, 2013

Substrate support temperature control

FOVELL RICHARD1 citations41