Inventor
NANGOY ROY C
US16 patents
⚠️ This page may combine multiple inventors who share the name “NANGOY ROY C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS7433759B2Oct 7, 2008
Apparatus and methods for positioning wafers
APPLIED MATERIALS INC60 citations97
US7155319B2Dec 26, 2006
Closed loop control on liquid delivery system ECP slim cell
APPLIED MATERIALS INC25 citations92
US9162236B2Oct 20, 2015
Proportional and uniform controlled gas flow delivery for dry plasma etch apparatus
APPLIED MATERIALS INC10 citations84
US7963826B2Jun 21, 2011
Apparatus and methods for conditioning a polishing pad
APPLIED MATERIALS INC9 citations81
US9488315B2Nov 8, 2016
Gas distribution apparatus for directional and proportional delivery of process gas to a process chamber
APPLIED MATERIALS INC3 citations73
US12459080B2Nov 4, 2025
Cleaning system for polishing liquid delivery arm
APPLIED MATERIALS INC0 citations60
US12240078B2Mar 4, 2025
Cleaning system for polishing liquid delivery arm
APPLIED MATERIALS INC0 citations60
US9070633B2Jun 30, 2015
Method and apparatus for high efficiency gas dissociation in inductive coupled plasma reactor
APPLIED MATERIALS INC1 citations51
US11251047B2Feb 15, 2022
Clog detection in a multi-port fluid delivery system
APPLIED MATERIALS INC0 citations50
NANGOY ROY C
4 patentsUS9034771B1May 19, 2015
Cooling pedestal for dicing tape thermal management during plasma dicing
NANGOY ROY C35 citations93
US9196498B1Nov 24, 2015
Stationary actively-cooled shadow ring for heat dissipation in plasma chamber
NANGOY ROY C20 citations91
US9117868B1Aug 25, 2015
Bipolar electrostatic chuck for dicing tape thermal management during plasma dicing
NANGOY ROY C24 citations91
US8753474B2Jun 17, 2014
Method and apparatus for high efficiency gas dissociation in inductive couple plasma reactor
NANGOY ROY C11 citations82