Inventor

HAIDER MAX

DE2 patents

⚠️ This page may combine multiple inventors who share the name “HAIDER MAX”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL NTS GMBH

1 patent

US7135677B2Nov 14, 2006

Beam guiding arrangement, imaging method, electron microscopy system and electron lithography system

ZEISS CARL NTS GMBH11 citations82

ZEISS CARL SMT AG

1 patent

US6903337B2Jun 7, 2005

Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same

ZEISS CARL SMT AG15 citations82