Inventor
DUNN FREDDIE L
US2 patents
Patents
2 patentsUS7169014B2Jan 30, 2007
Apparatuses for controlling the temperature of polishing pads used in planarizing micro-device workpieces
MICRON TECHNOLOGY INC20 citations86
US7033253B2Apr 25, 2006
Polishing pad conditioners having abrasives and brush elements, and associated systems and methods
MICRON TECHNOLOGY INC16 citations76