Inventor
KHMELICHEK ALEKSANDR
US6 patents
⚠️ This page may combine multiple inventors who share the name “KHMELICHEK ALEKSANDR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
4 patentsUS7492442B2Feb 17, 2009
Adjustable resolution interferometric lithography system
ASML HOLDING NV6 citations72
US7474385B2Jan 6, 2009
Adjustable resolution interferometric lithography system
ASML HOLDING NV6 citations72
US7253879B2Aug 7, 2007
Liquid immersion lithography system with tilted liquid flow
ASML HOLDING NV6 citations72
US7751030B2Jul 6, 2010
Interferometric lithographic projection apparatus
ASML HOLDING NV5 citations58