Inventor
CHEN LI-SHIUN
TW5 patents
⚠️ This page may combine multiple inventors who share the name “CHEN LI-SHIUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
3 patentsUS8048810B2Nov 1, 2011
Method for metal gate N/P patterning
TAIWAN SEMICONDUCTOR MFG137 citations95
US6794302B1Sep 21, 2004
Dynamic feed forward temperature control to achieve CD etching uniformity
TAIWAN SEMICONDUCTOR MFG21 citations90
US8994116B2Mar 31, 2015
Hybrid gate process for fabricating FinFET device
TAIWAN SEMICONDUCTOR MFG10 citations82