Inventor
VELLANKI VENUGOPAL
US8 patents
⚠️ This page may combine multiple inventors who share the name “VELLANKI VENUGOPAL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS11003093B2May 11, 2021
Process variability aware adaptive inspection and metrology
ASML NETHERLANDS BV5 citations82
US10514614B2Dec 24, 2019
Process variability aware adaptive inspection and metrology
ASML NETHERLANDS BV8 citations82
US11238189B2Feb 1, 2022
Process window optimizer
ASML NETHERLANDS BV3 citations71
US11176307B2Nov 16, 2021
Method and system for pattern configuration
ASML NETHERLANDS BV4 citations71
US12141507B2Nov 12, 2024
Process window optimizer
ASML NETHERLANDS BV0 citations61
US12092965B2Sep 17, 2024
Process variability aware adaptive inspection and metrology
ASML NETHERLANDS BV0 citations60
US11460784B2Oct 4, 2022
Method for determining candidate patterns from set of patterns of a patterning process
ASML NETHERLANDS BV0 citations52