Inventor
BRENNEN MICHAEL
US3 patents
Patents
3 patentsUS9859141B2Jan 2, 2018
Apparatus and method for aligning and centering wafers
SUSS MICROTEC LITHOGRAPHY GMBH2 citations70
US9837295B2Dec 5, 2017
Apparatus and method for semiconductor wafer leveling, force balancing and contact sensing
SUSS MICROTEC LITHOGRAPHY GMBH3 citations70
US10580678B2Mar 3, 2020
Apparatus and method for semiconductor wafer leveling, force balancing and contact sensing
SUSS MICROTEC LITHOGRAPHY GMBH0 citations49