Inventor

LIU CHI-JEN

TW42 patents

⚠️ This page may combine multiple inventors who share the name “LIU CHI-JEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LIU CHI-JEN

TAIWAN SEMICONDUCTOR MFG CO LTD

Oxidation and etching post metal gate CMP

Oxidation and etching post metal gate CMP

Mechanism for forming metal gate structure

Methods and systems for chemical mechanical polish and clean

Formation method of semiconductor device structure

Methods of forming an abrasive slurry and methods for chemical- mechanical polishing

Methods of forming an abrasive slurry and methods for chemical-mechanical polishing

Composition and method for polishing and integrated circuit

Metal heterojunction structure with capping metal layer

Method for metal gate surface clean

Metal heterojunction structure with capping metal layer

External heating system for use in chemical mechanical polishing system

Method for metal gate surface clean

CMP slurry and CMP method

Metal heterojunction structure with capping metal layer

Methods of forming an abrasive slurry and methods for chemical-mechanical polishing

Semiconductor device cleaning solution, method of use, and method of manufacture

Slurry composition and method for polishing and integrated circuit

Slurry composition, semiconductor structure and method for forming the same

Semiconductor device cleaning solution, method of use, and method of manufacture

Semiconductor devices formed using multiple planarization processes

Method for reducing metal plug corrosion and device

Semiconductor device cleaning solution, method of use, and method of manufacture

Method for reducing metal plug corrosion and device

Methods for chemical mechanical polishing and forming interconnect structure

Chemical mechanical polishing slurry composition, method for chemical mechanical polishing and method for forming connecting structure

Methods for chemical mechanical polishing and forming interconnect structure

Mechanism for forming metal gate structure

Vias with metal caps for underlying conductive lines

Method for metal gate surface clean

Systems and methods for chemical mechanical polish and clean

CMP slurry and CMP method

Systems and methods for chemical mechanical polish and clean

Method for forming semiconductor structure using polishing process

Method for metal gate surface clean

In-situ defect count detection in post chemical mechanical polishing

Methods of forming semiconductor devices using multiple planarization processes

TAIWAN SEMICONDUCTOR MFG

Oxidation and etching post metal gate CMP

Method for cleaning metal gate surface

TU CHE-HAO

Gate height loss improvement for a transistor

HWU YEU KUANG

Particles and manufacturing methods thereof

HWU YEU-KUANG

Methods of treating cancers