Inventor
KANG SUNGKYU
KR5 patents
⚠️ This page may combine multiple inventors who share the name “KANG SUNGKYU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
4 patentsUS11823866B2Nov 21, 2023
Thin film forming method
ASM IP HOLDING BV3 citations68
US10914004B2Feb 9, 2021
Thin-film deposition method and manufacturing method of semiconductor device
ASM IP HOLDING BV3 citations67
US11814728B2Nov 14, 2023
Method for filling a gap in a three-dimensional structure on a semiconductor substrate
ASM IP HOLDING BV0 citations57
US12503764B2Dec 23, 2025
Substrate processing method
ASM IP HOLDING BV0 citations41