Inventor
KANG HO-YOUNG
KR15 patents
⚠️ This page may combine multiple inventors who share the name “KANG HO-YOUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
11 patentsUS5446587AAug 29, 1995
Projection method and projection system and mask therefor
SAMSUNG ELECTRONICS CO LTD63 citations95
US5387961AFeb 7, 1995
Illumination system for projection exposing apparatus
SAMSUNG ELECTRONICS CO LTD9 citations73
US5386266AJan 31, 1995
Projection exposure system
SAMSUNG ELECTRONICS CO LTD10 citations73
US5978138ANov 2, 1999
Projection exposure systems
SAMSUNG ELECTRONICS CO LTD8 citations72
US5853921ADec 29, 1998
Methods of fabricating phase shift masks by controlling exposure doses
SAMSUNG ELECTRONICS CO LTD15 citations72
US5851706ADec 22, 1998
Phase shift masks including chromium oxide and alumina phase shifter patterns, and methods of manufacturing and using the same
SAMSUNG ELECTRONICS CO LTD14 citations72
US5808796ASep 15, 1998
Projection method and projection system and mask therefor
SAMSUNG ELECTRONICS CO LTD8 citations72
US5661601AAug 26, 1997
Projection method and projection system and mask therefor
SAMSUNG ELECTRONICS CO LTD8 citations72
US5608576AMar 4, 1997
Projection method and projection system and mask therefor
SAMSUNG ELECTRONICS CO LTD7 citations72
US5504627AApr 2, 1996
Projection exposure system
SAMSUNG ELECTRONICS CO LTD17 citations72
US6218204B1Apr 17, 2001
Capacitance compensation for topological measurements in a semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations59