Inventor
SOHN CHANG-JIN
KR10 patents
Patents
10 patentsUS5725973AMar 10, 1998
Photo mask and method for manufacturing same
SAMSUNG ELECTRONICS CO LTD76 citations95
US5446587AAug 29, 1995
Projection method and projection system and mask therefor
SAMSUNG ELECTRONICS CO LTD63 citations95
US5985491ANov 16, 1999
Reflectors for photolithographic projection and related systems and methods
SAMSUNG ELECTRONICS CO LTD21 citations92
US5547788AAug 20, 1996
Mask and method for manufacturing the same
SAMSUNG ELECTRONICS CO LTD26 citations92
US5585210ADec 17, 1996
Mask pattern of a semiconductor device and a method of manufacturing fine patterns using the same
SAMSUNG ELECTRONICS CO LTD51 citations89
US5726738AMar 10, 1998
Aperture for off-axis illumination and projection exposure apparatus employing the same
SAMSUNG ELECTRONICS CO LTD9 citations73
US5978138ANov 2, 1999
Projection exposure systems
SAMSUNG ELECTRONICS CO LTD8 citations72
US5808796ASep 15, 1998
Projection method and projection system and mask therefor
SAMSUNG ELECTRONICS CO LTD8 citations72
US5661601AAug 26, 1997
Projection method and projection system and mask therefor
SAMSUNG ELECTRONICS CO LTD8 citations72
US5608576AMar 4, 1997
Projection method and projection system and mask therefor
SAMSUNG ELECTRONICS CO LTD7 citations72