Inventor
LEE CHANG-HUHN
KR7 patents
Patents
7 patentsUS7473954B2Jan 6, 2009
Bitline of semiconductor device having stud type capping layer and method for fabricating the same
SAMSUNG ELECTRONICS CO LTD5 citations72
US7566924B2Jul 28, 2009
Semiconductor device with gate spacer of positive slope and fabrication method thereof
SAMSUNG ELECTRONICS CO LTD3 citations60
US7217618B2May 15, 2007
Semiconductor device and method for fabricating the same using damascene process
SAMSUNG ELECTRONICS CO LTD2 citations60
US8009895B2Aug 30, 2011
Semiconductor wafer analysis system
SAMSUNG ELECTRONICS CO LTD3 citations57
US6982199B2Jan 3, 2006
Bitline of semiconductor device having stud type capping layer and method for fabricating the same
SAMSUNG ELECTRONICS CO LTD0 citations50
US6969673B2Nov 29, 2005
Semiconductor device with gate space of positive slope and fabrication method thereof
SAMSUNG ELECTRONICS CO LTD1 citations50
US7923323B2Apr 12, 2011
Metal capacitor including lower metal electrode having hemispherical metal grains
SAMSUNG ELECTRONICS CO LTD0 citations48