Inventor
YIIN LIH-HUAH
US9 patents
⚠️ This page may combine multiple inventors who share the name “YIIN LIH-HUAH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
4 patentsUS7126681B1Oct 24, 2006
Closed region defect detection system
KLA TENCOR TECH CORP43 citations95
US7027635B1Apr 11, 2006
Multiple design database layer inspection
KLA TENCOR TECH CORP11 citations81
US7167185B1Jan 23, 2007
Visualization of photomask databases
KLA TENCOR TECH CORP9 citations73
US7499156B2Mar 3, 2009
Closed region defect detection system
KLA TENCOR TECH CORP4 citations62
KLA TENCOR CORP
3 patentsUS7873204B2Jan 18, 2011
Method for detecting lithographically significant defects on reticles
KLA TENCOR CORP56 citations97
US9092847B2Jul 28, 2015
Detection of thin lines for selective sensitivity during reticle inspection using processed images
KLA TENCOR CORP0 citations51
US9733640B2Aug 15, 2017
Method and apparatus for database-assisted requalification reticle inspection
KLA TENCOR CORP1 citations45