Inventor

OHTA SHINRO

JP6 patents

⚠️ This page may combine multiple inventors who share the name “OHTA SHINRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

3 patents

US7081044B2Jul 25, 2006

Polishing apparatus and polishing pad

EBARA CORP16 citations82

US7021991B2Apr 4, 2006

Polishing apparatus

EBARA CORP11 citations82

US10207390B2Feb 19, 2019

Processing end point detection method, polishing method, and polishing apparatus

EBARA CORP1 citations61

SHIMIZU NOBURU

1 patent

US8554356B2Oct 8, 2013

Processing end point detection method, polishing method, and polishing apparatus

SHIMIZU NOBURU25 citations90

TADA MITSUO

1 patent

US8696924B2Apr 15, 2014

Polishing apparatus and polishing method

TADA MITSUO4 citations68

SHIMADZU CORP

1 patent

US7101257B2Sep 5, 2006

Substrate polishing apparatus

SHIMADZU CORP3 citations62