Inventor

MITANI RYUICHIRO

JP4 patents

⚠️ This page may combine multiple inventors who share the name “MITANI RYUICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

3 patents

US7300332B2Nov 27, 2007

Polished state monitoring apparatus and polishing apparatus using the same

EBARA CORP21 citations90

US10207390B2Feb 19, 2019

Processing end point detection method, polishing method, and polishing apparatus

EBARA CORP1 citations61

US10890899B2Jan 12, 2021

Method of semiconductor manufacturing apparatus and non-transitory computer-readable storage medium storing a program of causing computer to execute design method of semiconductor manufacturing apparatus

EBARA CORP0 citations48

SHIMIZU NOBURU

1 patent

US8554356B2Oct 8, 2013

Processing end point detection method, polishing method, and polishing apparatus

SHIMIZU NOBURU25 citations90