Inventor

SCHAAREMAN PAULUS BARTHOLOMEUS JOHANNES

NL2 patents

⚠️ This page may combine multiple inventors who share the name “SCHAAREMAN PAULUS BARTHOLOMEUS JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VAN EMPEL TJARKO ADRIAAN RUDOLF

1 patent

US8072575B2Dec 6, 2011

Lithographic apparatus with temperature sensor and device manufacturing method

VAN EMPEL TJARKO ADRIAAN RUDOLF1 citations44

SCHMITZ ROGER WILHELMUS ANTONIUS HENRICUS

1 patent

US9176398B2Nov 3, 2015

Method and system for thermally conditioning an optical element

SCHMITZ ROGER WILHELMUS ANTONIUS HENRICUS1 citations36