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Inventor
MOHN JONATHAN
US
2 patents
⚠️ This page may combine multiple inventors who share the name “MOHN JONATHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATTSON TECH INC
1 patent
US7972444B2
Jul 5, 2011
Workpiece support with fluid zones for temperature control
MATTSON TECH INC
20 citations
90
DEVINE DANIEL J
1 patent
US9184072B2
Nov 10, 2015
Advanced multi-workpiece processing chamber
DEVINE DANIEL J
16 citations
79