Inventor
MIZUNOURA HIROSHI
JP5 patents
Patents
5 patentsUS10139732B2Nov 27, 2018
Substrate processing apparatus, substrate processing method and recording medium
TOKYO ELECTRON LTD4 citations70
US10732508B2Aug 4, 2020
Coating and developing method and coating and developing apparatus
TOKYO ELECTRON LTD2 citations69
US10394125B2Aug 27, 2019
Coating and developing method and coating and developing apparatus
TOKYO ELECTRON LTD3 citations69
US11036140B2Jun 15, 2021
Substrate processing apparatus, substrate processing method and recording medium
TOKYO ELECTRON LTD0 citations50
US10955743B2Mar 23, 2021
Substrate processing apparatus, substrate processing method and computer-readable recording medium
TOKYO ELECTRON LTD0 citations49