Inventor
ORISAKA Masayuki
JP6 patents
Patents
6 patentsUS11621174B2Apr 4, 2023
Substrate processing apparatus
SCREEN HOLDINGS CO LTD3 citations69
US11715649B2Aug 1, 2023
Substrate processing apparatus
SCREEN HOLDINGS CO LTD2 citations68
US12159784B2Dec 3, 2024
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD2 citations66
US12334366B2Jun 17, 2025
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations48
US11587803B2Feb 21, 2023
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations48
US12308258B2May 20, 2025
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations46