Inventor

WAKI JYUNYA

JP3 patents

Patents

3 patents

US8361271B2Jan 29, 2013

Ceramic-metal bonded body and method of producing the same

NGK INSULATORS LTD4 citations58

US12538755B2Jan 27, 2026

Member for semiconductor manufacturing apparatus

NGK INSULATORS LTD0 citations48

US12211725B2Jan 28, 2025

Electrostatic chuck assembly

NGK INSULATORS LTD0 citations48