Inventor
HAMADA SATOMI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “HAMADA SATOMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
7 patentsUS5860181AJan 19, 1999
Method of and apparatus for cleaning workpiece
EBARA CORP64 citations95
US5966765AOct 19, 1999
Cleaning apparatus
EBARA CORP67 citations93
US6106635AAug 22, 2000
Washing method and washing apparatus
EBARA CORP41 citations91
US6221171B1Apr 24, 2001
Method and apparatus for conveying a workpiece
EBARA CORP11 citations73
US6595220B2Jul 22, 2003
Apparatus for conveying a workpiece
EBARA CORP3 citations62
US11382412B2Jul 12, 2022
Method and apparatus for cleaning PVA brush
EBARA CORP1 citations60
US10229841B2Mar 12, 2019
Wafer drying apparatus and wafer drying method
EBARA CORP0 citations39