Inventor
JOHNSON WALTER H
US10 patents
⚠️ This page may combine multiple inventors who share the name “JOHNSON WALTER H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
2 patentsUS6815959B2Nov 9, 2004
Systems and methods for measuring properties of conductive layers
KLA TENCOR TECH CORP18 citations83
US7050160B1May 23, 2006
Process and apparatus for integrating sheet resistance measurements and reflectance measurements of a thin film in a common apparatus
KLA TENCOR TECH CORP8 citations72