Inventor

ZHANG ZHUOXIAN

CN3 patents

Patents

3 patents

US11249110B2Feb 15, 2022

Resistivity probes with curved portions

KLA TENCOR CORP0 citations56

US10514391B2Dec 24, 2019

Resistivity probe having movable needle bodies

KLA TENCOR CORP1 citations56

US9435826B2Sep 6, 2016

Variable spacing four-point probe pin device and method

KLA TENCOR CORP0 citations34