Inventor
ZHU NANCHANG
CN12 patents
⚠️ This page may combine multiple inventors who share the name “ZHU NANCHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
8 patentsUS8004290B1Aug 23, 2011
Method and apparatus for determining dielectric layer properties
KLA TENCOR CORP12 citations82
US11249110B2Feb 15, 2022
Resistivity probes with curved portions
KLA TENCOR CORP0 citations56
US10514391B2Dec 24, 2019
Resistivity probe having movable needle bodies
KLA TENCOR CORP1 citations56
US7724003B1May 25, 2010
Substrate conditioning for corona charge control
KLA TENCOR CORP2 citations55
US9030219B2May 12, 2015
Variable pressure four-point coated probe pin device and method
KLA TENCOR CORP0 citations50
US10663279B2May 26, 2020
Dynamic determination of metal film thickness from sheet resistance and TCR value
KLA TENCOR CORP0 citations35
US9435826B2Sep 6, 2016
Variable spacing four-point probe pin device and method
KLA TENCOR CORP0 citations34
US10302677B2May 28, 2019
Multiple pin probes with support for performing parallel measurements
KLA TENCOR CORP0 citations29