Inventor
MONO TOBIAS
DE15 patents
⚠️ This page may combine multiple inventors who share the name “MONO TOBIAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
11 patentsUS6897943B2May 24, 2005
Method and apparatus for aerial image improvement in projection lithography using a phase shifting aperture
INFINEON TECHNOLOGIES AG20 citations92
US7049241B2May 23, 2006
Method for forming a trench in a layer or a layer stack on a semiconductor wafer
INFINEON TECHNOLOGIES AG9 citations73
US6605396B2Aug 12, 2003
Resolution enhancement for alternating phase shift masks
INFINEON TECHNOLOGIES AG9 citations72
US6828647B2Dec 7, 2004
Structure for determining edges of regions in a semiconductor wafer
INFINEON TECHNOLOGIES AG8 citations71
US6551874B2Apr 22, 2003
Self-aligned STI process using nitride hard mask
INFINEON TECHNOLOGIES AG12 citations71
US6440759B1Aug 27, 2002
Method of measuring combined critical dimension and overlay in single step
INFINEON TECHNOLOGIES AG10 citations68
US7107562B2Sep 12, 2006
Method and apparatus for the arrangement of contact-making elements of components of an integrated circuit, computer-readable storage medium and program element
INFINEON TECHNOLOGIES AG4 citations62
US6579650B2Jun 17, 2003
Method and apparatus for determining photoresist pattern linearity
INFINEON TECHNOLOGIES AG2 citations62
US6566227B2May 20, 2003
Strap resistance using selective oxidation to cap DT poly before STI etch
INFINEON TECHNOLOGIES AG6 citations59
US7618867B2Nov 17, 2009
Method of forming a doped portion of a semiconductor and method of forming a transistor
INFINEON TECHNOLOGIES AG5 citations58
US12471396B2Nov 11, 2025
Image sensor device
INFINEON TECHNOLOGIES AG0 citations50
QIMONDA AG
4 patentsUS7863136B2Jan 4, 2011
Method of manufacturing integrated circuits including a FET with a gate spacer and a fin
QIMONDA AG35 citations91
US7622354B2Nov 24, 2009
Integrated circuit and method of manufacturing an integrated circuit
QIMONDA AG21 citations90
US7871943B2Jan 18, 2011
Method of making transistor gates with controlled work function
QIMONDA AG2 citations62
US7718475B2May 18, 2010
Method for manufacturing an integrated circuit including a transistor
QIMONDA AG4 citations60