Inventor
VERHAGEN MARTINUS CORNELIS MAR
NL6 patents
Patents
6 patentsUS7397533B2Jul 8, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV23 citations92
US7379155B2May 27, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV28 citations90
US7378025B2May 27, 2008
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations73
US7271873B2Sep 18, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations56
US7072021B2Jul 4, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations55
US7378669B2May 27, 2008
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV0 citations39