Inventor

HAYAKAWA HARUMI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “HAYAKAWA HARUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SENZAKI TAKAHIRO

2 patents

US8999631B2Apr 7, 2015

Primer and pattern forming method for layer including block copolymer

SENZAKI TAKAHIRO7 citations80

US9134617B2Sep 15, 2015

Solvent developable negative resist composition, resist pattern formation method, and method for forming pattern of layer including block copolymer

SENZAKI TAKAHIRO4 citations69

FUJIKAWA SHIGENORI

1 patent

US9060415B2Jun 16, 2015

Method for producing substrate having surface nanostructure

FUJIKAWA SHIGENORI1 citations46

RIKEN

1 patent

US8961802B2Feb 24, 2015

Method of forming fine pattern, and developer

RIKEN0 citations39