Inventor

ROMAN CHALYKH

KR3 patents

⚠️ This page may combine multiple inventors who share the name “ROMAN CHALYKH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KIM SANGHYUN

1 patent

US9087698B2Jul 21, 2015

Beam shapers, annealing systems employing the same, methods of heat treating substrates and methods of fabricating semiconductor devices

KIM SANGHYUN5 citations81

SAMSUNG ELECTRONICS CO LTD

1 patent

US9466490B2Oct 11, 2016

Beam shapers, annealing systems employing the same, methods of heat treating substrates and methods of fabricating semiconductor devices

SAMSUNG ELECTRONICS CO LTD4 citations70

KIM SANG-HYUN

1 patent

US9176375B2Nov 3, 2015

Methods of reducing a registration error of a photomask, and related photomasks and methods of manufacturing an integrated circuit

KIM SANG-HYUN1 citations50