Inventor

YU JEN-KAN

US4 patents

⚠️ This page may combine multiple inventors who share the name “YU JEN-KAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US9633846B2Apr 25, 2017

Internal plasma grid applications for semiconductor fabrication

LAM RES CORP8 citations81

US9230819B2Jan 5, 2016

Internal plasma grid applications for semiconductor fabrication in context of ion-ion plasma processing

LAM RES CORP15 citations81

CALIFORNIA INST OF TECHN

1 patent

US9595653B2Mar 14, 2017

Phononic structures and related devices and methods

CALIFORNIA INST OF TECHN9 citations81

YU JEN-KAN

1 patent

US9419198B2Aug 16, 2016

Nanomesh phononic structures for low thermal conductivity and thermoelectric energy conversion materials

YU JEN-KAN3 citations65