Inventor
LU HAILIANG
CN4 patents
Patents
4 patentsUS10268125B2Apr 23, 2019
Device and method for detecting overlay error
SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD5 citations65
US10937151B2Mar 2, 2021
Automatic optical inspection method
SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD1 citations60
US10942129B2Mar 9, 2021
Chip defect detection device and detection method
SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD0 citations45
US11549891B2Jan 10, 2023
Automatic optical inspection device and method
SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD0 citations42