Inventor
QIAO YAN
MO11 patents
⚠️ This page may combine multiple inventors who share the name “QIAO YAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV MACAU SCI & TECH
9 patentsUS9223307B1Dec 29, 2015
Method for scheduling single-arm cluster tools with wafer revisiting and residency time constraints
UNIV MACAU SCI & TECH15 citations81
US9333645B1May 10, 2016
Optimization of start-up transient processes for dual-armed cluster tools with wafer revisiting
UNIV MACAU SCI & TECH10 citations79
US10101721B2Oct 16, 2018
System and method for determining an optimized schedule of a production line
UNIV MACAU SCI & TECH2 citations70
US10134613B2Nov 20, 2018
Cluster tool apparatus and a method of controlling a cluster tool apparatus
UNIV MACAU SCI & TECH2 citations69
US10073444B2Sep 11, 2018
Petri net-based optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools
UNIV MACAU SCI & TECH2 citations60
US9618930B1Apr 11, 2017
Scheduling start-up process for time-constrained single-arm cluster tools
UNIV MACAU SCI & TECH0 citations40
US10643873B2May 5, 2020
Cluster tool apparatus and a method of controlling a cluster tool apparatus
UNIV MACAU SCI & TECH0 citations39
US10001773B2Jun 19, 2018
Optimal one-wafer scheduling of single-arm multi-cluster tools with tree-like topology
UNIV MACAU SCI & TECH0 citations38
US10001772B2Jun 19, 2018
Optimally scheduling of close-down process for single-arm cluster tools with wafer residency time constraints
UNIV MACAU SCI & TECH0 citations38