Inventor
LIM JAESOON
KR13 patents
Patents
13 patentsUS11524973B2Dec 13, 2022
Metal compounds and methods of fabricating semiconductor devices using the same
SAMSUNG ELECTRONICS CO LTD0 citations61
US11081389B2Aug 3, 2021
Method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations61
US12453077B2Oct 21, 2025
Capacitor and memory device
SAMSUNG ELECTRONICS CO LTD0 citations60
US12398166B2Aug 26, 2025
Method of selectively forming cobalt metal layer by using cobalt compound, and method of fabricating semiconductor device by using cobalt compound
SAMSUNG ELECTRONICS CO LTD0 citations60
US12029027B2Jul 2, 2024
Capacitor and memory device
SAMSUNG ELECTRONICS CO LTD0 citations60
US11678476B2Jun 13, 2023
Capacitor and DRAM device including the same
SAMSUNG ELECTRONICS CO LTD0 citations60
US11466043B2Oct 11, 2022
Niobium compound and method of forming thin film
SAMSUNG ELECTRONICS CO LTD0 citations59
US11254698B2Feb 22, 2022
Cobalt precursor and methods for manufacture using the same
SAMSUNG ELECTRONICS CO LTD0 citations58
US10900119B2Jan 26, 2021
Tungsten precursor and method of forming Tungsten containing layer using the same
SAMSUNG ELECTRONICS CO LTD0 citations57
US10847362B2Nov 24, 2020
Method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD1 citations56
US7989877B2Aug 2, 2011
Semiconductor devices including a dielectric layer
SAMSUNG ELECTRONICS CO LTD1 citations51
US11332486B2May 17, 2022
Aluminum compound and method for manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations49
US12593434B2Mar 31, 2026
Method of forming capacitor and method of manufacturing DRAM element by using the same
SAMSUNG ELECTRONICS CO LTD0 citations43