Inventor
MIKKOLA ROBERT
US4 patents
Patents
4 patentsUS11261533B2Mar 1, 2022
Aluminum plating at low temperature with high efficiency
APPLIED MATERIALS INC0 citations59
US11629423B2Apr 18, 2023
Electrochemical depositions of ruthenium-containing materials
APPLIED MATERIALS INC0 citations58
US10240248B2Mar 26, 2019
Adaptive electric field shielding in an electroplating processor using agitator geometry and motion control
APPLIED MATERIALS INC1 citations58
US11203816B1Dec 21, 2021
Electroplating seed layer buildup and repair
APPLIED MATERIALS INC0 citations52