Inventor
KIDA YOSHIKI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “KIDA YOSHIKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
6 patentsUS6400445B2Jun 4, 2002
Method and apparatus for positioning substrate
NIKON CORP87 citations97
US6225012B1May 1, 2001
Method for positioning substrate
NIKON CORP57 citations96
US6577382B2Jun 10, 2003
Substrate transport apparatus and method
NIKON CORP55 citations95
US6141108AOct 31, 2000
Position control method in exposure apparatus
NIKON CORP20 citations92
US6900880B2May 31, 2005
Exposure apparatus, surface position adjustment unit, mask, and device manufacturing method
NIKON CORP9 citations71
US8035799B2Oct 11, 2011
Exposure apparatus, exposure method, and device producing method
NIKON CORP2 citations61
JEOL LTD
3 patentsKIDA YOSHIKI
2 patentsUS9239524B2Jan 19, 2016
Exposure condition determination method, exposure method, exposure apparatus, and device manufacturing method involving detection of the situation of a liquid immersion region
KIDA YOSHIKI4 citations69
US8913224B2Dec 16, 2014
Exposure apparatus, exposure method, and device producing method
KIDA YOSHIKI0 citations48