Inventor
MIYA YOSHIKO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “MIYA YOSHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO CHEMICAL CO
4 patentsUS6893792B2May 17, 2005
Positive resist composition
SUMITOMO CHEMICAL CO53 citations91
US7129014B2Oct 31, 2006
Positive resist composition
SUMITOMO CHEMICAL CO4 citations61
US6645693B2Nov 11, 2003
Resist composition
SUMITOMO CHEMICAL CO5 citations61
US6677102B2Jan 13, 2004
Chemical amplifying type positive resist composition
SUMITOMO CHEMICAL CO0 citations50