Inventor
INO TOMOMI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “INO TOMOMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
4 patentsUS6541287B2Apr 1, 2003
Temperature measuring method and apparatus, measuring method for the thickness of the formed film, measuring apparatus for the thickness of the formed film thermometer for wafers
TOSHIBA KK24 citations89
US7324855B2Jan 29, 2008
Process-state management system, management server and control server adapted for the system, method for managing process-states, method for manufacturing a product, and computer program product for the management server
TOSHIBA KK24 citations88
US6780657B2Aug 24, 2004
Temperature measuring method and apparatus, measuring method for the thickness of the formed film, measuring apparatus for the thickness of the formed film thermometer for wafers
TOSHIBA KK14 citations80
US7463941B2Dec 9, 2008
Quality control system, quality control method, and method of lot-to-lot wafer processing
TOSHIBA KK8 citations73