Inventor

KOOLS JACQUES

FR6 patents

⚠️ This page may combine multiple inventors who share the name “KOOLS JACQUES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MEDIA LARIO SRL

2 patents

US8895946B2Nov 25, 2014

Source-collector modules for EUV lithography employing a GIC mirror and a LPP source

MEDIA LARIO SRL7 citations79

US8050380B2Nov 1, 2011

Zone-optimized mirrors and optical systems using same

MEDIA LARIO SRL0 citations49

VEECO INSTR INC

1 patent

US6572744B1Jun 3, 2003

Dual collimated deposition apparatus and method of use

VEECO INSTR INC16 citations91

VEECO CVC INC

1 patent

US6592728B1Jul 15, 2003

Dual collimated deposition apparatus and method of use

VEECO CVC INC20 citations90

KOOLS JACQUES

1 patent

US8810775B2Aug 19, 2014

EUV mirror module with a nickel electroformed curved mirror

KOOLS JACQUES7 citations76

PIROVANO GIORGIO

1 patent

US8276866B2Oct 2, 2012

Adjustable clips for grazing-incidence collectors

PIROVANO GIORGIO0 citations33