Inventor

WOO SANG-YOON

KR5 patents

⚠️ This page may combine multiple inventors who share the name “WOO SANG-YOON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

3 patents

US9772555B2Sep 26, 2017

Methods of forming patterns using photoresists

SAMSUNG ELECTRONICS CO LTD52 citations93

US10134606B2Nov 20, 2018

Method of forming patterns and method of manufacturing integrated circuit device using the same

SAMSUNG ELECTRONICS CO LTD9 citations79

US10353290B2Jul 16, 2019

Photoresist composition for extreme ultraviolet and method of forming photoresist pattern using the same

SAMSUNG ELECTRONICS CO LTD1 citations56

YOON JUN-HO

1 patent

US8815697B2Aug 26, 2014

Method of fabricating semiconductor device

YOON JUN-HO9 citations80

WOO SANG-YOON

1 patent

US8125617B2Feb 28, 2012

Apparatus and method for manufacturing semiconductor device

WOO SANG-YOON1 citations45